LEADER 01278oam  2200409zu 450 
001 996214028203316
005 20210807003051.0
010   $a1-4244-3816-0
010   $a1-4244-3815-2
035   $a(CKB)1000000000709916
035   $a(SSID)ssj0000453007
035   $a(PQKBManifestationID)12171159
035   $a(PQKBTitleCode)TC0000453007
035   $a(PQKBWorkID)10473233
035   $a(PQKB)11729119
035   $a(NjHacI)991000000000709916
035   $a(EXLCZ)991000000000709916
100   $a20160829d2009      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2009 17th International Conference on Advanced Thermal Processing of Semiconductors
210 31$a[Place of publication not identified]$cI E E E$d2009
215   $a1 online resource (216 pages) $cillustrations
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4244-3814-4 
606   $aSemiconductor doping$vCongresses
615  0$aSemiconductor doping
676   $a004.6
702   $aIEEE Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a996214028203316
996   $a2009 17th International Conference on Advanced Thermal Processing of Semiconductors$92501864
997   $aUNISA