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100   $a20160829d2001      uy              
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2001 IEEE International SOI Conference Proceedings
210 31$a[Place of publication not identified]$cI E E E$d2001
215   $a1 online resource (x, 158 pages) $cillustrations
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-6739-1 
320   $aIncludes bibliographical references and index.
330   $aTopics covered in this volume include: double gate / vertical channel structures; SOI material science, modification, characterization, and manufacture; physics and modelling of SOI devices; and SOI circuit applications (high performance, high voltage, microwave, analog circuits).
606   $aSilicon-on-insulator technology$vCongresses
615  0$aSilicon-on-insulator technology
676   $a621.38152
801  0$bPQKB
906   $aPROCEEDING
912   $a996213511203316
996   $a2001 IEEE International SOI Conference Proceedings$92521880
997   $aUNISA