LEADER 01648oam  2200457zu 450 
001 996212464703316
005 20210807003356.0
035   $a(CKB)111026746721648
035   $a(SSID)ssj0000396609
035   $a(PQKBManifestationID)12101415
035   $a(PQKBTitleCode)TC0000396609
035   $a(PQKBWorkID)10335795
035   $a(PQKB)10706348
035   $a(EXLCZ)99111026746721648
100   $a20160829d1998      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIWSM : 1998 3rd International Workshop on Statistical Metrology : June 7, 1998, Honolulu
210 31$a[Place of publication not identified]$cIEEE$d1998
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-4338-7 
606   $aSemiconductors$xStatistical methods$xCharacterization$vCongresses
606   $aSemiconductors$xMeasurement$vCongresses
606   $aElectrical Engineering$2HILCC
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aSemiconductors$xStatistical methods$xCharacterization
615  0$aSemiconductors$xMeasurement
615  7$aElectrical Engineering
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
676   $a621.3815/2
712 02$aIEEE Electron Devices Society
712 12$aInternational Workshop on Statistical Metrology
801  0$bPQKB
906   $aPROCEEDING
912   $a996212464703316
996   $aIWSM : 1998 3rd International Workshop on Statistical Metrology : June 7, 1998, Honolulu$92506155
997   $aUNISA