LEADER 01517nam  2200421   450 
001 996211918503316
005 20230421041101.0
035   $a(CKB)111026746705918
035   $a(SSID)ssj0000450653
035   $a(PQKBManifestationID)12139841
035   $a(PQKBTitleCode)TC0000450653
035   $a(PQKBWorkID)10444460
035   $a(PQKB)11393541
035   $a(WaSeSS)IndRDA00123616
035   $a(EXLCZ)99111026746705918
100   $a20200524d1992      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aASMC '92 $e3rd Annual Advanced Semiconductor Manufacturing Conference and Workshop 1992 : September 30-October 1, 1992, Hyatt Regency, Cambridge, Massachusetts /$fsponsored by Institute of Electrical and Electronics Engineers [and three others]
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d1992.
215   $a1 online resource (205 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-0740-2 
606   $aSemiconductor industry$vCongresses
606   $aSemiconductors$xDesign and construction$vCongresses
615  0$aSemiconductor industry
615  0$aSemiconductors$xDesign and construction
676   $a621.38152
712 02$aInstitute of Electrical and Electronics Engineers,
801  0$bWaSeSS
801  1$bWaSeSS
906   $aBOOK
912   $a996211918503316
996   $aASMC '92$92498554
997   $aUNISA