LEADER 01353nam  2200421   450 
001 996211914503316
005 20230421041024.0
035   $a(CKB)111026746705992
035   $a(SSID)ssj0000445256
035   $a(PQKBManifestationID)12175670
035   $a(PQKBTitleCode)TC0000445256
035   $a(PQKBWorkID)10481134
035   $a(PQKB)10887818
035   $a(WaSeSS)IndRDA00119408
035   $a(EXLCZ)99111026746705992
100   $a20200303d1993      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aIVMC '93 $esixth International Vacuum Microelectronics Conference : Newport, Rhode Island, July 12-15, 1993 : technical digest /$fIEEE Electron Devices Society
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d1993.
215   $a1 online resource (40 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-0852-2 
606   $aMicroelectronics$vCongresses
606   $aVacuum technology$vCongresses
615  0$aMicroelectronics
615  0$aVacuum technology
676   $a621.381
712 02$aIEEE Electron Devices Society,
801  0$bWaSeSS
801  1$bWaSeSS
906   $aBOOK
912   $a996211914503316
996   $aIVMC '93$92528498
997   $aUNISA