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200 00$aSemiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
210   $cIEEE
311   $a1-4244-1141-6 
311   $a1-4244-1142-4 
517   $a2007 International Symposium on Semiconductor Manufacturing
517   $aBipolar/BiCMOS Circuits and Technology Meeting 
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