LEADER 00923oam 2200325zu 450 001 996211694703316 005 20210807003644.0 010 $a1-4244-3615-X 035 $a(CKB)2400000000001698 035 $a(SSID)ssj0000452825 035 $a(PQKBManifestationID)12169710 035 $a(PQKBTitleCode)TC0000452825 035 $a(PQKBWorkID)10472087 035 $a(PQKB)10249916 035 $a(EXLCZ)992400000000001698 100 $a20160829d2009 uy 101 0 $aeng 181 $ctxt 182 $cc 183 $acr 200 10$a2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference 210 31$a[Place of publication not identified]$cI E E E$d2009 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a1-4244-3614-1 702 $aIEEE Staff 801 0$bPQKB 906 $aPROCEEDING 912 $a996211694703316 996 $a2009 IEEE$92188592 997 $aUNISA LEADER 01651nam0 2200337 i 450 001 VAN0061617 005 20240214025305.699 010 $a90-676-4380-7 100 $a20071017d2003 |0itac50 ba 101 $aeng 102 $aNL 105 $a|||| ||||| 200 1 $aIll-posed and non-classical problems of mathematical physics and analysis$eproceedings of the international conference Samarkand, Uzbekistan$feditor-in- chief M. M. Lavrent'ev$gmanaging editor S. I. Kabanikhin$geditorial board Akb. H. Begmatov ... [et al.] 210 $aUtrecht [etc.]$cVSP$d2003 215 $a205 p.$d25 cm 410 1$1001VAN0044927$12001 $aInverse and ill-posed problems series$1210 $aUtrecht$cVSP 606 $a35-XX$xPartial differential equations [MSC 2020]$3VANC019763$2MF 606 $a65-XX$xNumerical analysis [MSC 2020]$3VANC019772$2MF 606 $a53-XX$xDifferential geometry [MSC 2020]$3VANC019813$2MF 606 $a45-XX$xIntegral equations [MSC 2020]$3VANC020265$2MF 606 $a34-XX$xOrdinary differential equations [MSC 2020]$3VANC021251$2MF 620 $dUtrecht$3VANL000779 702 1$aBegmatov$bA. H.$3VANV048665 702 1$aKabanikhin$bS. I.$3VANV048558 712 $aVSP$3VANV111133$4650 801 $aIT$bSOL$c20240216$gRICA 899 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$1IT-CE0120$2VAN08 912 $aVAN0061617 950 $aBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA$d08PREST 35-XX 2359 $e08 7911 II 20071017 996 $aIll-posed and non-classical problems of mathematical physics and analysis$91415549 997 $aUNICAMPANIA