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183   $acr
200 10$a2002 IEEE/LEOS International Conference on Optical MEMs : conference digest : 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland
210 31$a[Place of publication not identified]$cIEEE$d2002
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-7595-5 
606   $aMicroelectromechanical systems$vCongresses
606   $aOptoelectronic devices$vCongresses
606   $aOptical MEMS$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aMicroelectromechanical systems
615  0$aOptoelectronic devices
615  0$aOptical MEMS
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.381
712 02$aLasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
712 12$aIEEE/LEOS International Conference on Optical MEMS
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906   $aPROCEEDING
912   $a996211257003316
996   $a2002 IEEE$92247189
997   $aUNISA