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200 10$a2007 IEEE/IEOS International Conference on Optical MEMS and Nanophotonics : Hualien, Taiwan, 12-16 August, 2007
210 31$a[Place of publication not identified]$cIEEE$d2007
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4244-0641-2 
606   $aMicroelectromechanical systems$vCongresses
606   $aOptical MEMS$vCongresses
606   $aNanophotonics$vCongresses
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615  0$aOptical MEMS
615  0$aNanophotonics
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
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712 12$aIEEE/LEOS International Conference on Optical MEMS and Nanophotonics
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996   $a2007 IEEE$92346897
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