LEADER 00941oas  2200277z- 450 
001 996207137203316
005 20190517164213.0
035   $a(CKB)958480255687
035   $a(EXLCZ)99958480255687
100   $a20180122cuuuuuuuu  -u-            -
101 0 $afre
200 00$aCleanroom technology
210   $aSevenoaks$cWilmington Media Ltd
311   $a1365-5531 
606   $aBusiness, Economy and Management$xBusiness Management
606   $aBusiness, Economy and Management$xGeneral and Others
606   $aEngineering$xGeneral and Others
606   $aEngineering$xIndustrial Engineering
615  4$aBusiness, Economy and Management$xBusiness Management
615  4$aBusiness, Economy and Management$xGeneral and Others
615  4$aEngineering$xGeneral and Others
615  4$aEngineering$xIndustrial Engineering
906   $aJOURNAL
912   $a996207137203316
996   $aCleanroom technology$92395584
997   $aUNISA