LEADER 02034oam 2200553zu 450 001 996206559403316 005 20210807003506.0 035 $a(CKB)111055184271208 035 $a(SSID)ssj0000395894 035 $a(PQKBManifestationID)12133636 035 $a(PQKBTitleCode)TC0000395894 035 $a(PQKBWorkID)10460988 035 $a(PQKB)11193959 035 $a(EXLCZ)99111055184271208 100 $a20160829d2001 uy 101 0 $aeng 181 $ctxt 182 $cc 183 $acr 200 10$a2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA 210 31$a[Place of publication not identified]$cNorthern California Chapter of the American Vacuum Society$d2001 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a0-9651577-5-X 606 $aSemiconductor wafers$xEffect of radiation on$vCongresses 606 $aSemiconductors$xDefects$vCongresses 606 $aPlasma radiation$vCongresses 606 $aSemiconductors$vCongresses 606 $aElectrical & Computer Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aElectrical Engineering$2HILCC 615 0$aSemiconductor wafers$xEffect of radiation on 615 0$aSemiconductors$xDefects 615 0$aPlasma radiation 615 0$aSemiconductors 615 7$aElectrical & Computer Engineering 615 7$aEngineering & Applied Sciences 615 7$aElectrical Engineering 676 $a621.3815/2 702 $aEngelhardt$b Manfred 702 $aGabriel$b Calvin T 702 $aHook$b Terence 712 02$aIEEE Electron Devices Society 712 02$aAmerican Vacuum Society 712 12$aInternational Symposium on Plasma Process-Induced Damage 801 0$bPQKB 906 $aPROCEEDING 912 $a996206559403316 996 $a2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey, California, USA$92531197 997 $aUNISA LEADER 02101oam 2200553zu 450 001 9910872958203321 005 20241212215203.0 035 $a(CKB)111085500348068 035 $a(SSID)ssj0000396273 035 $a(PQKBManifestationID)12091451 035 $a(PQKBTitleCode)TC0000396273 035 $a(PQKBWorkID)10463966 035 $a(PQKB)10764102 035 $a(EXLCZ)99111085500348068 100 $a20160829d2002 uy 101 0 $aeng 181 $ctxt 182 $cc 183 $acr 200 10$a2002 12th International Conference on Semiconducting and Insulating Materials : SIMC-XII-2002 : June 30 - July 5, 2002, Institute of Electrical Engineering, Slovak Academy of Science, Bratislava, Slovak Republic 210 31$a[Place of publication not identified]$cIEEE$d2002 300 $aBibliographic Level Mode of Issuance: Monograph 311 08$a9780780374188 311 08$a0780374185 606 $aSemiconductors$vCongresses 606 $aDielectrics$vCongresses 606 $aGallium arsenide semiconductors$vCongresses 606 $aCompound semiconductors$vCongresses 606 $aElectrical & Computer Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aElectrical Engineering$2HILCC 615 0$aSemiconductors 615 0$aDielectrics 615 0$aGallium arsenide semiconductors 615 0$aCompound semiconductors 615 7$aElectrical & Computer Engineering 615 7$aEngineering & Applied Sciences 615 7$aElectrical Engineering 676 $a621.3815/2 702 $aDybecky$b F 702 $aBreza$b Juraj 702 $aZat'ko$b B 712 02$aSlovenskâa akadâemia vied 712 12$aInternational Semiconducting and Insulating Materials Conference 801 0$bPQKB 906 $aPROCEEDING 912 $a9910872958203321 996 $a2002 12th International Conference on Semiconducting and Insulating Materials : SIMC-XII-2002 : June 30 - July 5, 2002, Institute of Electrical Engineering, Slovak Academy of Science, Bratislava, Slovak Republic$92507945 997 $aUNINA