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100   $a20160829d2004      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aDigest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
210 31$a[Place of publication not identified]$cJapan Society of Applied Physics$d2004
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a4-9902472-0-5 
606   $aMicrofabrication$xVery large scale integration$xDesign and construction$vCongresses
606   $aIntegrated circuits$vCongresses
606   $aLithography$vCongresses
606   $aNanotechnology$vCongresses
606   $aMicroelectronics$vCongresses
606   $aPhysics$2HILCC
606   $aPhysical Sciences & Mathematics$2HILCC
606   $aAtomic Physics$2HILCC
615  0$aMicrofabrication$xVery large scale integration$xDesign and construction
615  0$aIntegrated circuits
615  0$aLithography
615  0$aNanotechnology
615  0$aMicroelectronics
615  7$aPhysics
615  7$aPhysical Sciences & Mathematics
615  7$aAtomic Physics
676   $a621.3815/31
712 02$aOyo Butsuri Gakkai
712 02$aAmerican Vacuum Society
712 02$aIEEE Electron Devices Society
712 12$aInternational Microprocesses and Nanotechnology Conference
801  0$bPQKB
906   $aPROCEEDING
912   $a996206243603316
996   $aDigest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan$92522489
997   $aUNISA