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101 0 $aeng
135   $aurun||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
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200 10$aIEEE transactions on semiconductor manufacturing $ea publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council
210   $aNew York, N.Y. $cInstitute of Electrical and Electronics Engineers
300   $aRefereed/Peer-reviewed
311   $a0894-6507 
606   $aSemiconductors$xDesign and construction$vPeriodicals
615  0$aSemiconductors$xDesign and construction
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712 02$aIEEE Components, Hybrids, and Manufacturing Technology Society.
712 02$aIEEE Electron Devices Society.
712 02$aIEEE Reliability Society.
712 02$aIEEE Solid-State Circuits Council.
712 02$aInstitute of Electrical and Electronics Engineers.
906   $aJOURNAL
912   $a996205104303316
996   $aIEEE transactions on semiconductor manufacturing$92577480
997   $aUNISA