LEADER 01629oam  2200421zu 450 
001 996204468903316
005 20220919173954.0
035   $a(CKB)111026746712734
035   $a(SSID)ssj0000455396
035   $a(PQKBManifestationID)12129504
035   $a(PQKBTitleCode)TC0000455396
035   $a(PQKBWorkID)10400460
035   $a(PQKB)10152404
035   $a(EXLCZ)99111026746712734
100   $a20160829d1995      uy             0
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop $etheme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, MA, USA
210 31$aNew York :$cInstitute of Electrical and Electronics Engineers ;$d1995
215   $avi, 391 pages $cillustrations ;$d28 cm
300   $aBibliographic Level Mode of Issuance: Monograph
311 1 $a0-7803-2713-6 
606   $aSemiconductor industry$xCongresses
606   $aSemiconductors$xDesign and construction$xCongresses
606   $aProcess control$xCongresses
615  0$aSemiconductor industry$xCongresses
615  0$aSemiconductors$xDesign and construction$xCongresses
615  0$aProcess control$xCongresses
712 02$aInstitute of Electrical and Electronics Engineers
712 02$aSemiconductor Equipment and Materials International
712 12$aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
801  0$bPQKB
906   $aBOOK
912   $a996204468903316
996   $aIEEE$9878179
997   $aUNISA