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100   $a20160829d1996      uy              
101 0 $aeng
181   $ctxt
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200 10$aIEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996
210 31$a[Place of publication not identified]$cInstitute of Electrical and Electronics Engineers$d1996
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-2985-6 
606   $aElectromechanical devices$xCongresses
606   $aMicroelectronics$xCongresses
606   $aDetectors$xCongresses
606   $aActuators$xCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aElectrical Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aElectromechanical devices$xCongresses
615  0$aMicroelectronics$xCongresses
615  0$aDetectors$xCongresses
615  0$aActuators$xCongresses
615  7$aElectrical & Computer Engineering
615  7$aElectrical Engineering
615  7$aEngineering & Applied Sciences
712 02$aIEEE Robotics and Automation Society
712 12$aIEEE Workshop on Micro Electro Mechanical Systems
801  0$bPQKB
906   $aBOOK
912   $a996204455803316
996   $aIEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996$92509856
997   $aUNISA