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100   $a20160829d2005      uy              
101 0 $aeng
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181   $ctxt
182   $cc
183   $acr
200 00$a2005 IEEE International Symposium on Semiconductor Manufacturing
210 31$a[Place of publication not identified]$cI E E E$d2005
215   $a1 online resource (xvi, 498 pages) $cillustrations
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-9143-8 
606   $aComputer integrated manufacturing systems$vCongresses
615  0$aComputer integrated manufacturing systems
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801  0$bPQKB
906   $aPROCEEDING
912   $a996204235103316
996   $a2005 IEEE International Symposium on Semiconductor Manufacturing$92496041
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