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101 0 $aeng
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200 10$aIon implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996
210 31$a[Place of publication not identified]$cInstitute of Electrical and Electronics Engineers$d1996
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-3289-X 
606   $aSemiconductors$xCongresses
606   $aIon implantation$xCongresses
606   $aSemiconductor doping$xCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aElectrical Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aSemiconductors$xCongresses
615  0$aIon implantation$xCongresses
615  0$aSemiconductor doping$xCongresses
615  7$aElectrical & Computer Engineering
615  7$aElectrical Engineering
615  7$aEngineering & Applied Sciences
676   $a621.3815/2
702   $aIshida$b Emi
712 12$aInternational Conference on Ion Implantation Technology
801  0$bPQKB
906   $aBOOK
912   $a996203711803316
996   $aIon implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996$92545678
997   $aUNISA