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200 10$a1996 IEEE 9th International Vacuum Microelectronics Conference Technical Digest
210 31$a[Place of publication not identified]$cIEEE$d1996
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-3594-5 
712 02$aIEEE, Institute of Electrical and Electronics Engineers, Inc. Staff
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996   $a1996 IEEE 9th International Vacuum Microelectronics Conference Technical Digest$92514395
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