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200 10$a12th International Conference on Solid-State Sensors, Actuators and Microsystems $e8-12 June 2003, Boston, MA, USA /$fIEEE Electron Devices Society
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d2003.
215   $a1 online resource (253 pages)
300   $a"Digest of Technical Papers Catalog Number 03TH8664."
311   $a0-7803-7731-1 
327   $av. 1. Papers 1A1.1-2E136.P -- v. 2. Papers 3A1.1-4D3.5.
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606   $aDetectors$vCongresses
606   $aActuators$vCongresses
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712 02$aIEEE Electron Devices Society,
712 12$aInternational Conference on Solid-State Sensors and Actuators
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996   $a12th International Conference on Solid-State Sensors, Actuators and Microsystems$92545660
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