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200 10$aRTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC
210 31$a[Place of publication not identified]$cIEEE$d2003
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-7874-1 
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606   $aSemiconductor doping$vCongresses
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615  0$aSemiconductors$xHeat treatment
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615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
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712 02$aIEEE Electron Devices Society
712 12$aInternational Conference on Advanced Thermal Processing of Semiconductors
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