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101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$a2004 Semiconductor Manufacturing Technology Workshop : date: September 9-10, 2004, location: the Ambassador Hotel-Hsinchu, Taiwan
210 31$a[Place of publication not identified]$cIEEE$d2004
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-8469-5 
606   $aSemiconductors$xDesign and construction$vCongresses
606   $aElectronic industries$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductors$xDesign and construction
615  0$aElectronic industries
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
712 02$aTaiwan Semiconductor Industry Association
712 02$aIEEE Electron Devices Society
712 02$aIEEE Electron Devices Society Taipei Chapter.
712 12$aSemiconductor Manufacturing Technology Workshop
801  0$bPQKB
906   $aPROCEEDING
912   $a996202109903316
996   $a2004 Semiconductor Manufacturing Technology Workshop : date: September 9-10, 2004, location: the Ambassador Hotel-Hsinchu, Taiwan$92545456
997   $aUNISA