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100   $a20160829d2006      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 14$aThe 2006 International Conference on MEMS, NANO, and Smart Systems : December 27-29, 2006, Cairo, Egypt : proceedings
210 31$a[Place of publication not identified]$cIEEE$d2006
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4244-0899-7 
606   $aMicroelectromechanical systems$vCongresses
606   $aNanotechnology$vCongresses
606   $aSystems on a chip$vCongresses
606   $aIntelligent control systems$vCongresses
606   $aSmart materials$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aMicroelectromechanical systems
615  0$aNanotechnology
615  0$aSystems on a chip
615  0$aIntelligent control systems
615  0$aSmart materials
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621
702   $aBadawy$b Wael
702   $aSalem$b Ashraf
712 02$aUniversity of Calgary
712 02$aIEEE Circuits and Systems Society
712 12$aInternational Conference on MEMS, NANO, and Smart Systems
801  0$bPQKB
906   $aPROCEEDING
912   $a996201760403316
996   $aThe 2006 International Conference on MEMS, NANO, and Smart Systems : December 27-29, 2006, Cairo, Egypt : proceedings$92544173
997   $aUNISA