LEADER 01141oam  2200397zu 450 
001 996200723203316
005 20210807001431.0
010   $a1-4244-6519-2
035   $a(CKB)2670000000038167
035   $a(SSID)ssj0000452724
035   $a(PQKBManifestationID)12129737
035   $a(PQKBTitleCode)TC0000452724
035   $a(PQKBWorkID)10472471
035   $a(PQKB)11488321
035   $a(NjHacI)992670000000038167
035   $a(EXLCZ)992670000000038167
100   $a20160829d2010      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
210 31$a[Place of publication not identified]$cI E E E$d2010
215   $a1 online resource
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4244-6517-6 
606   $aProcess control$vCongresses
615  0$aProcess control
676   $a658.562
702   $aIEEE Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a996200723203316
996   $a2010 21st Annual IEEE$92498930
997   $aUNISA