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100   $a20160829d2007      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aDigest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan
210 31$a[Place of publication not identified]$cJapan Society of Applied Physics$d2007
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a4-9902472-4-8 
606   $aNanotechnology$vCongresses
606   $aMicroelectronics$vCongresses
606   $aMicrolithography$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aNanotechnology
615  0$aMicroelectronics
615  0$aMicrolithography
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a620/.5
712 02$aIEEE Electron Devices Society
712 02$aOyo Butsuri Gakkai
712 12$aInternational Microprocesses and Nanotechnology Conference
801  0$bPQKB
906   $aPROCEEDING
912   $a996200407103316
996   $aDigest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan$92513182
997   $aUNISA