LEADER 01275nam 2200373 450 001 996200241003316 005 20230331015623.0 035 $a(CKB)111055184270166 035 $a(WaSeSS)IndRDA00124281 035 $a(EXLCZ)99111055184270166 100 $a20200601d1991 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$a1991 International Conference on Solid-State Sensors and Actuators $edigest of technical papers : 24-27 June 1991, San Francisco, CA, USA /$fInstitute of Electrical and Electronics Engineers 210 1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d1991. 215 $a1 online resource (111 pages) 311 $a0-87942-585-7 606 $aTransducers$vCongresses 606 $aDetectors$vCongresses 606 $aActuators$vCongresses 615 0$aTransducers 615 0$aDetectors 615 0$aActuators 676 $a681.2 712 02$aInstitute of Electrical and Electronics Engineers, 801 0$bWaSeSS 801 1$bWaSeSS 906 $aBOOK 912 $a996200241003316 996 $a1991 International Conference on Solid-State Sensors and Actuators$92498239 997 $aUNISA