LEADER 01843nam  2200481   450 
001 996199964103316
005 20230421041147.0
035   $a(CKB)111026746754386
035   $a(SSID)ssj0000395505
035   $a(PQKBManifestationID)12085000
035   $a(PQKBTitleCode)TC0000395505
035   $a(PQKBWorkID)10450601
035   $a(PQKB)11517066
035   $a(WaSeSS)IndRDA00123470
035   $a(EXLCZ)99111026746754386
100   $a20200526d1998      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aDigest of papers $eMicroprocesses and Nanotechnology '98 : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea /$fsponsored by the Japan Society of Applied Physics, the Korean Vacuum Society ; technical cosponsored by IEEE Electron Device Society
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d1998.
215   $a1 online resource (352 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a4-930813-83-2 
606   $aIntegrated circuits$xVery large scale integration$xDesign and construction$vCongresses
606   $aNanotechnology$vCongresse
606   $aMicroelectronics$vCongresses
615  0$aIntegrated circuits$xVery large scale integration$xDesign and construction
615  0$aNanotechnology
615  0$aMicroelectronics
676   $a621.395
712 02$aO?yo? Butsuri Gakkai,
712 02$aKorean Vacuum Society,
712 02$aIEEE Electron Devices Society,
712 12$aInternational Microprocesses and Nanotechnology Conference
801  0$bWaSeSS
801  1$bWaSeSS
906   $aPROCEEDING
912   $a996199964103316
996   $aDigest of papers$91886461
997   $aUNISA