LEADER 01395nam  2200421   450 
001 996199637803316
005 20230421041127.0
035   $a(CKB)111026746723972
035   $a(SSID)ssj0000455125
035   $a(PQKBManifestationID)12203235
035   $a(PQKBTitleCode)TC0000455125
035   $a(PQKBWorkID)10399563
035   $a(PQKB)10301387
035   $a(WaSeSS)IndRDA00123481
035   $a(EXLCZ)99111026746723972
100   $a20200528d1998      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aIVMC '98 $e11th International Vacuum Microelectronics Conference : July 19-24, 1998, The Grove Park Inn Asheville, NC, USA /$fInstitute of Electrical and Electronics Engineers
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d1998.
215   $a1 online resource (327 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-5096-0 
606   $aVacuum technology$vCongresses
606   $aMicroelectronics$vCongresses
615  0$aVacuum technology
615  0$aMicroelectronics
676   $a621.55
712 02$aInstitute of Electrical and Electronics Engineers,
801  0$bWaSeSS
801  1$bWaSeSS
906   $aPROCEEDING
912   $a996199637803316
996   $aIVMC '98$92534436
997   $aUNISA