LEADER 01095nam  2200325zn 450 
001 996199629803316
035   $a(CKB)111026746725024
035   $a(EXLCZ)99111026746725024
100   $a20220628d1998      uy             0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$a1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) /$fIEEE Electron Devices Society. Taipei Chapter
210  1$aPiscataway, N.J :$cIEEE Computer Society Press,$d1998.
215   $a1 online resource
311   $a0-7803-5179-7 
517   $a1998 Semiconductor Manufacturing Technology Workshop 
531   $aSEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP, 1998
606   $aElectronic industries$vCongresses
615  0$aElectronic industries
676   $a621.381
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aPROCEEDING
912   $a996199629803316
996   $a1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133)$92513415
997   $aUNISA