LEADER 01659oam  2200433zu 450 
001 996199309903316
005 20210807003514.0
035   $a(CKB)111055184247090
035   $a(SSID)ssj0000527239
035   $a(PQKBManifestationID)12179881
035   $a(PQKBTitleCode)TC0000527239
035   $a(PQKBWorkID)10522704
035   $a(PQKB)11014088
035   $a(EXLCZ)99111055184247090
100   $a20160829d2001      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 14$aThe 14th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001
210 31$a[Place of publication not identified]$cInstitute of Electrical and Electronics Engineers$d2001
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-5998-4 
606   $aMicroelectromechanical systems$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aMicroelectromechanical systems
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.381
712 02$aIEEE Robotics and Automation Society
712 12$aIEEE International Conference on Micro Electro Mechanical Systems
801  0$bPQKB
906   $aPROCEEDING
912   $a996199309903316
996   $aThe 14th IEEE International Conference on Micro Electro Mechanical Systems : MEMS 2001 : Interlaken, Switzerland, January 21-25, 2001$92501915
997   $aUNISA