LEADER 00745nas  2200265 a 450 
001 996197550203316
005 20160630162254.0
035   $a(OCoLC)416480806
035   $a(CKB)1000000000531260
035   $a(CONSER)  2009235458
035   $a(DE-599)ZDB2022467-9
035   $a(EXLCZ)991000000000531260
100   $a20090626a19939999  uy              
101 0 $aeng
200 00$aMicromachine
210   $aTokyo $cMicromachine Center
606   $aMicroelectrical systems$vPeriodicals
606   $aMicrotechnology$vPeriodicals
615  0$aMicroelectrical systems
615  0$aMicrotechnology
712 02$aMicromachine Center (Japan)
906   $aJOURNAL
912   $a996197550203316
996   $aMicromachine$92275628
997   $aUNISA