LEADER 01344nas 2200385 450 001 990003482890203316 005 20220810130115.0 011 $a0734-211X 035 $a000348289 035 $aUSA01000348289 035 $a(ALEPH)000348289USA01 035 $a000348289 100 $a20110113a19839999km-y-itay50------ba 101 0 $aeng 102 $aUS 110 $aagazz--|||| 200 1 $aJournal of vacuum science & technology. B: Microelectronics and nanometer structures vacuum, surfaces and films$fAmerican Vacuum Society 207 $aA.1, n.1(1983)- 210 $aWashington$cAmerican Institute of Physics$d1983-1990 215 $avolumi$cill.$d28 cm 326 $aBimestrale 430 1$1001000348285$12001$aJournal of vacuum science & technology 606 0 $aFisica tecnica$xPeriodici$2BNCF 676 $a621.5 712 02$aAmerican Vacuum Society 801 0$aIT$bsalbc$gISBD 912 $a990003482890203316 958 $aSCI$bPER IV$c1983-1990. 959 $aSE 979 $aMANCUSO$b90$c20110113$lUSA01$h1200 979 $aMANCUSO$b90$c20110127$lUSA01$h1110 979 $aMANCUSO$b90$c20110127$lUSA01$h1113 979 $aMANCUSO$b90$c20110202$lUSA01$h1232 996 $aJournal of vacuum science & technology. B: Microelectronics and nanometer structures vacuum, surfaces and films$91110639 997 $aUNISA