LEADER 01359nas 2200409 450 001 990003482870203316 005 20110202123144.0 011 $a0734-2101 035 $a000348287 035 $aUSA01000348287 035 $a(ALEPH)000348287USA01 035 $a000348287 100 $a20110113a19839999km-y-itay50------ba 101 0 $aeng 102 $aUS 110 $aagazz--|||| 200 1 $aJournal of vacuum science & technology. A: vacuum, surfaces and films$fAmerican Vacuum Society 207 $aA.1, n.1(1983)- 210 $aWashington$cAmerican Institute of Physics$d1983 215 $av.$cill.$d28 cm 326 $aBimestrale 430 1$1001000348285$12001$aJournal of vacuum science & technology 606 0 $aFisica tecnica$xPeriodici$2BNCF 676 $a621.05 712 02$aAmerican Vacuum Society 801 0$aIT$bsalbc$gISBD 912 $a990003482870203316 958 $aSCI$bPER IV$c1983-1992;$l1990; 959 $aSE 979 $aMANCUSO$b90$c20110113$lUSA01$h1157 979 $aMANCUSO$b90$c20110113$lUSA01$h1158 979 $aMANCUSO$b90$c20110127$lUSA01$h1110 979 $aMANCUSO$b90$c20110127$lUSA01$h1112 979 $aMANCUSO$b90$c20110202$lUSA01$h1231 979 $aMANCUSO$b90$c20110202$lUSA01$h1231 996 $aJournal of vacuum science & technology A: Vacuum, surfaces and films$9791402 997 $aUNISA