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100   $a20090917d1983----km-y0itay50------ba
101   $aeng
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105   $a||||||||001yy
200 1 $aVacuum technology, thin films and sputtering$ean introduction$fR. V. Stuart
210   $aOrlando [etc.]$cAcademic Press$dcopyr. 1983
215   $aVIII, 151 p.$cill.$d23 cm
606 0 $atecnologia del vuoto
606 0 $aFilm sottili
606 0 $aSpruzzamento catodico
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700  1$aSTUART,$bR. V.$0605864
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996   $aVacuum technology, thin films and sputtering$91120988
997   $aUNISA