LEADER 01049nam--2200349---450-
001 990003310350203316
005 20090915091641.0
035   $a000331035
035   $aUSA01000331035
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035   $a000331035
100   $a20090915d1980----km-y0itay50------ba
101   $aeng
102   $aNL
105   $a||||||||001yy
200 1 $aFine line lithography$fEdited Roger Newman
210   $aAmsterdam [etc.]$cNorth-Holland Publishing Company$d1980
215   $aVII, 481 p.$cill. graf. tab.$d22 cm
225 2 $aMaterials Processing-Theory and practices$v1
410  0$12001$aMaterials Processing-Theory and practices$v1
606 0 $aCircuiti integrati
606 0 $aLitografia
676   $a621.381 73
702  1$aNEWMAN,$bRoger
801  0$aIT$bsalbc$gISBD
912   $a990003310350203316
951   $a621.381 73 FIN$b7698/CBS$c681.381 73$d00327261
959   $aBK
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996   $aFine line lithography$91122089
997   $aUNISA