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200 1 $a<<Vol. 3>> : <<The>> submicron MOSFET$fStanley Wolf
210   $aSunset Beach$cLattice Press$dcopyr. 1995
215   $aXXI, 722 p.$cill.$d24 cm
461  1$1001000156747$12001$aSilicon processing for the VLSI Era
606 0 $aCircuiti integrati VLSI
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700  1$aWOLF,$bStanley$0557421
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