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200 1 $aIn Situ Real-Time Characterization of Thin Films$fedited by Orlando Auciello , Alan R. Krauss
210   $aNew York$cJohn Wiley and Sons$dcopyr. 2001
215   $a263 p.$cill.$d24 cm
606 0 $aFilm sottili
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702  1$aKRAUSS,$bAlan R.
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997   $aUNISA