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200 1 $aHandbook of thin film process technology$feditors David A. Glocker, S. Ismat Shah
210   $aBristol ; Philadelphia$cIoP$dc1995-
215   $av.$d31 cm.
300   $aA fogli mobili, aggiornati periodicamente
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461  1$1001-------$12001
463 \1$1001990001837070203316$12001 $a98/1: Reactive sputtering
463 \1$1001990001837120203316$12001 $a98/2: Recipes for optical materials
463 \1$1001990001837190203316$12001 $a[Supplement] 99/1: Substrate preparation for thin film deposition
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