LEADER 01192nam2-2200397---450-
001 990001567300203316
005 20040524110834.0
010   $a0-9616721-6-1
035   $a000156730
035   $aUSA01000156730
035   $a(ALEPH)000156730USA01
035   $a000156730
100   $a20040415d2000----km-y0itaa50------ba
101 0 $aeng
102   $aUS
105   $aa|||z|||001yy
200 1 $a<<Vol. 1:>> Process technology$fStanley Wolf, Richard N. Tauber
205   $a2. ed
210   $aSunset Beach$cLattice press$d2000
215   $aXXXVI, 890 p.$cill.$d24 cm.
461  1$1001000156747$12001$aSilicon processing for the VLSI Era
606 0 $aCircuiti integrati VLSI
606 0 $aSilicone
676   $a621.395
700  1$aWOLF,$bStanley$0557421
701  1$aTAUBER,$bRicherd N.$0560542
801  0$aIT$bsalbc$gISBD$gISBD$gISBD
912   $a990001567300203316
951   $a621.395 WOL 1$b18192 Ing.$c621.395$d00132669
959   $aBK
969   $aTEC
979   $aMARIA$b10$c20040415$lUSA01$h1158
979   $aRENATO$b90$c20040524$lUSA01$h1104
979   $aRENATO$b90$c20040524$lUSA01$h1108
996   $aProcess technology$9937938
997   $aUNISA