LEADER 01059nam--2200373---450- 001 990001540360203316 005 20040326145952.0 035 $a000154036 035 $aUSA01000154036 035 $a(ALEPH)000154036USA01 035 $a000154036 100 $a20040326d1980----km-y0itay0103----ba 101 0 $aeng 102 $aUS 105 $aa|||||||001yy 200 1 $aElectron beam technology in microelectronic fabrication$fedited by George R. Brewer 210 $aNew York$cAcademic Press$d1980 215 $aXI, 362 p.$cill.$d23 cm 410 0$12001 454 1$12001 461 1$1001-------$12001 606 0 $aElettronica 606 0 $aLitografia 676 $a621.381 702 1$aBREWER,$bGeorge Raymond 801 0$aIT$bsalbc$gISBD 912 $a990001540360203316 951 $aXV B 328$b90219 L.M.$cXV B 959 $aBK 969 $aUMA 979 $aSIAV4$b10$c20040326$lUSA01$h1459 979 $aPATRY$b90$c20040406$lUSA01$h1747 996 $aElectron beam technology in microelectronic fabrication$9940575 997 $aUNISA