LEADER 01195nam2-2200397---450-
001 990001304260203316
005 20040524120904.0
010   $a0-9616721-4-5
035   $a000130426
035   $aUSA01000130426
035   $a(ALEPH)000130426USA01
035   $a000130426
100   $a20031217d1990----km-y0enga50------ba
101 0 $aeng
102   $aUS
105   $ay|||z|||001yy
200 1 $a<<Vol. 2:>> Process integration$fStanley Wolf
210   $aSunset Beach$cLattice press$d1990
215   $aXXXI, 753 p.$cill.$d24 cm.
461  1$1001000156747$12001$aSilicon processing for the VLSI Era
606 0 $aCircuiti integrati VLSI
606 0 $aSilicone
676   $a621.395
700  1$aWOLF,$bStanley$0557421
801  0$aIT$bsalbc$gISBD
912   $a990001304260203316
951   $a621.395 WOL 2$b18195 Ing.$c621.395$d00132680
959   $aBK
969   $aTEC
979   $aMARIA$b10$c20031217$lUSA01$h0953
979   $aPATRY$b90$c20040406$lUSA01$h1732
979   $aRENATO$b90$c20040524$lUSA01$h1207
979   $aRENATO$b90$c20040524$lUSA01$h1207
979   $aRENATO$b90$c20040524$lUSA01$h1209
996   $aProcess integration$9929288
997   $aUNISA