LEADER 01249nam2-2200385li-450 
001 990000224540203316
005 20180312154910.0
010   $a0-201-14695-9
035   $a0022454
035   $aUSA010022454
035   $a(ALEPH)000022454USA01
035   $a0022454
100   $a20001109d1988----km-y0itay0103----ba
101 0 $aeng
102   $aUS
200 1 $aIntroduction to microelectronic fabrication$fRichard C. Jaeger
210   $aReading (Mass.) [etc.]$cAddison-Wesley$dcopyr. 1988
215   $aXIII, 232 p.$cill.$d24 cm
225 2 $aModular series on solid state devices$v5
410  0$10010022453$12001$aModular series on solid state devices
610 1 $acircuiti integrati vlsi$aprogettazione
676   $a621381
700  1$aJAEGER,$bRichard C.$028080
801   $aSistema bibliotecario di Ateneo dell' Università di Salerno$gRICA
912   $a990000224540203316
951   $a621.381 73 JAE$b0000871
959   $aBK
969   $aTEC
979   $c19910325
979   $c20001110$lUSA01$h1714
979   $aPATTY$b90$c20011030$lUSA01$h1727
979   $c20020403$lUSA01$h1630
979   $aPATRY$b90$c20040406$lUSA01$h1616
996   $aIntroduction to microelectronic fabrication$91488585
997   $aUNISA