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200 1 $aIntroduction to microelectronic fabrication$fRichard C. Jaeger
210   $aReading$cAddison-Wesley$d1993
215   $aXIII, 232 p.$d23 cm
225 2 $aModular series on sold state devices$v5
410  0$12001$aModular series on sold state devices$v5
606   $aCircuiti VLSI
606   $aCircuiti integrati$xProgettazione
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700  1$aJAEGER,$bRichard C.$028080
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996   $aIntroduction to microelectronic fabrication$91488585
997   $aUNISA