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101 0 $aeng
181   $2rdacontent
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200 12$aA FORTRAN program for analysis of data from microelectronic test structures /$fRichard L. Mattis, Martin G. Buehler
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1983.
215   $a1 online resource
225 1 $aNBS special publication ;$v400-75
300   $a1983.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aMattis$b Richard L$01390315
701   $aBuehler$b Martin G$01401144
701   $aMattis$b Richard L$01390315
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