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035   $a(CKB)40380521600041
035   $a(MiAaPQ)EBC32291584
035   $a(Au-PeEL)EBL32291584
035   $a(OCoLC)1535965617
035   $a(NjHacI)9940380521600041
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100   $a20250912d2025      uy         0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aASML and Dutch Physics $eA History of the Advanced Research Center for Nanolithography (ARCNL), 2014-2024
205   $a1st ed.
210  1$aAmsterdam :$cAmsterdam University Press,$d2025.
210  4$dİ2025.
215   $a1 online resource (153 pages)
311 08$a90-485-7163-4 
330   $aIn 2014, the global market leader in advanced chipmaking machines ASML joined forces with NWO, AMOLF, the University of Amsterdam, and Vrije Universiteit to establish a new research institute in the Netherlands: the Advanced Research Center for Nanolithography (ARCNL).
606   $aNanolithography
606   $aScience and industry
615  0$aNanolithography.
615  0$aScience and industry.
676   $a621.381531
700   $aBrookhuis$b Hein$01844856
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9911020826703321
996   $aASML and Dutch Physics$94432641
997   $aUNINA