LEADER 00980nam0-22003251i-450- 001 990001119480403321 010 $a0-12-752140-2 035 $a000111948 035 $aFED01000111948 035 $a(Aleph)000111948FED01 035 $a000111948 100 $a20000920d1994----km-y0itay50------ba 101 0 $aeng 200 1 $aEpitaxial Microstructures$fVolume Editor Arthur C. Gossard 210 $aBoston [etc.]$cAcademic Press$d1994 225 1 $aSemiconductors and Semimetals$fedited by R.K. Willardson, Albert C. Beer, Eicke R. Weber$v40 610 0 $aSemiconduttori 676 $a537.622 700 1$aGossard,$bArthur C.$053730 702 1$aBeer,$bAlbert C. 702 1$aWeber,$bEicke R. 702 1$aWillardson,$bRobert Kent$f<1923- > 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990001119480403321 952 $a30-099.053$b19754$fFI1 959 $aFI1 996 $aEpitaxial Microstructures$9336811 997 $aUNINA DB $aING01 LEADER 02819oam 22005894a 450 001 9911020366403321 005 20230828224457.0 010 $a0-470-84777-8 010 $a9786610555796 010 $a1-280-55579-3 010 $a0-470-85838-9 010 $a1-280-55531-9 035 $a(CKB)111056485558400 035 $a(MH)008797883-0 035 $a(SSID)ssj0000080383 035 $a(PQKBManifestationID)11125527 035 $a(PQKBTitleCode)TC0000080383 035 $a(PQKBWorkID)10095740 035 $a(PQKB)10362906 035 $a(MiAaPQ)EBC4957926 035 $a(Au-PeEL)EBL4957926 035 $a(CaONFJC)MIL55579 035 $a(OCoLC)1024270809 035 $a(EXLCZ)99111056485558400 100 $a20010718d2001 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aCleanroom technology $efundamentals of design, testing, and operation /$fW. Whyte$b[electronic resource] 205 $a1st ed. 210 $aChichester ;$aNew York $cJ. Wiley$dc2001 215 $a1 online resource (xiv, 309 p. )$cill. ; 300 $aIncludes index. 311 1 $a0-471-86842-6 311 1 $a0-470-85270-4 320 $aIncludes bibliographical references and index. 327 $aThe history of cleanrooms -- Cleanroom classification standards -- Information sources -- The design of turbulently ventilated and ancillary cleanrooms -- Design of unidirectional cleanrooms and clean air devices -- Construction materials and surface finishes -- High efficiency air filtration -- Cleanroom testing and monitoring -- Measurement of air quantities and pressure differences -- Air movement control between and within cleanrooms -- Filter installation leak testing -- Airborne particle counts -- Microbial counts -- Operating a cleanroom: contamination control -- Cleanroom disciplines -- Entry and exit of personnel -- Materials, equipment and machinery -- Cleanroom clothing -- Cleanroom masks and gloves -- Cleaning a cleanroom. 330 $aThis comprehensive overview of the fundamentals, design, testing and operation of cleanroom systems provides novices with an introduction to this state-of-the-art technology and professionals with an accessible reference to current standards. 606 $aClean rooms 615 0$aClean rooms. 676 $a620.8/6 700 $aWhyte$b W$0868947 801 0$bDLC 801 1$bDLC 801 2$bDLC 906 $aBOOK 912 $a9911020366403321 996 $aCleanroom technology$94418497 997 $aUNINA 999 $aThis Record contains information from the Harvard Library Bibliographic Dataset, which is provided by the Harvard Library under its Bibliographic Dataset Use Terms and includes data made available by, among others the Library of Congress