LEADER 02785nam 22006134a 450 001 9911019270903321 005 20200520144314.0 010 $a9786610449125 010 $a9781280449123 010 $a1280449128 010 $a9780470340493 010 $a0470340495 010 $a9780470866795 010 $a0470866799 010 $a9780470866788 010 $a0470866780 035 $a(CKB)1000000000356036 035 $a(EBL)257715 035 $a(SSID)ssj0000241576 035 $a(PQKBManifestationID)11176286 035 $a(PQKBTitleCode)TC0000241576 035 $a(PQKBWorkID)10300058 035 $a(PQKB)11130054 035 $a(MiAaPQ)EBC257715 035 $a(OCoLC)86227317 035 $a(Perlego)2774569 035 $a(EXLCZ)991000000000356036 100 $a20051107d2006 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aScanning Auger electron microscopy /$f[edited by] Martin Prutton, Mohamed M. El Gomati 210 $aChichester, West Sussex, England ;$aHoboken, NJ $cJohn Wiley & Sons$dc2006 215 $a1 online resource (388 p.) 300 $aDescription based upon print version of record. 311 08$a9780470866771 311 08$a0470866772 320 $aIncludes bibliographical references and index. 327 $aScanning Auger Electron Microscopy; Contents; List of Contributors; Preface; Acknowledgments; 1. Introduction; 2. The Auger Process; 3. Instrumentation; 4. The Spatial Resolution; 5. Forming an Auger Image; 6. Image Processing and Interpretation; 7. Quantification of Auger Images; 8. Applications: Materials Science; 9. Applications: Semiconductor Manufacturing; 10. Concluding Remarks; Author Index; Subject Index 330 $aThis eagerly-awaited volume has been edited by two academic researchers with extensive and reputable experience in this field. Emphasis is given to the underlying science of the method of Auger microscopy, and its instrumental realization, the visualization and interpretation of the data in the sets of the images that form the output of the measurements and the methods used to quantify the images. Imaging artefacts in Auger microscopy and methods to correct them are also detailed. The authors describe the technique of Multi-Spectral Auger Microscopy (MULSAM) and demonstrate its advantages in m 606 $aScanning Auger electron microscopy 615 0$aScanning Auger electron microscopy. 676 $a502.8/25 701 $aPrutton$b M$049964 701 $aEl Gomati$b Mohamed M$01839340 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911019270903321 996 $aScanning Auger electron microscopy$94418544 997 $aUNINA