LEADER 02520nam 2200625Ia 450 001 9911007374103321 005 20200520144314.0 010 $a1-282-26334-X 010 $a9786612263347 010 $a1-61583-323-4 010 $a1-84919-068-2 035 $a(CKB)1000000000704172 035 $a(EBL)471706 035 $a(OCoLC)460736339 035 $a(SSID)ssj0000152690 035 $a(PQKBManifestationID)12007854 035 $a(PQKBTitleCode)TC0000152690 035 $a(PQKBWorkID)10339751 035 $a(PQKB)11536555 035 $a(MiAaPQ)EBC471706 035 $a(EXLCZ)991000000000704172 100 $a20050203d2005 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aFabrication of GaAs devices /$fby Albert G. Baca and Carol I.H. Ashby 210 $aLondon $cInstitution of Electrical Engineers$dc2005 215 $a1 online resource (370 p.) 225 1 $aProcessing series ;$vno. 6 300 $aDescription based upon print version of record. 311 $a0-86341-353-6 320 $aIncludes bibliographical references and index. 327 $aCONTENTS; Acknowledgment; Abbreviations; 1. Introduction to GaAs devices; 2. Semiconductor properties, growth, characterisation and processing techniques; 3. Cleaning and passivation of GaAs and related alloys; 4. Wet etching and photolithography of GaAs and related alloys; 5. Dry etching of GaAs and related alloys; 6. Ohmic contacts; 7. Schottky contacts; 8. Field effect transistors; 9. Heterojunction bipolar transistors; 10. Wet oxidation for optoelectronic and MIS GaAs devices; Glossary; Index 330 $aThis book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. 410 0$aSPE processing series ;$vno. 6. 606 $aElectronics 606 $aGallium arsenide semiconductors 615 0$aElectronics. 615 0$aGallium arsenide semiconductors. 676 $a620.1 676 $a620.1/93 676 $a620.193 676 $a621.38152 700 $aBaca$b A. G$01823069 701 $aAshby$b Carol Iris Hill$f1953-$01823070 712 02$aInstitution of Electrical Engineers. 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911007374103321 996 $aFabrication of GaAs devices$94389481 997 $aUNINA