LEADER 01339oam 2200421zu 450 001 9911006706903321 005 20210807000331.0 010 $a1-59124-779-9 035 $a(CKB)1000000000019442 035 $a(SSID)ssj0000668713 035 $a(PQKBManifestationID)11430658 035 $a(PQKBTitleCode)TC0000668713 035 $a(PQKBWorkID)10700203 035 $a(PQKB)10142166 035 $a(WaSeSS)Ind00032535 035 $a(EXLCZ)991000000000019442 100 $a20160829d2004 uy 101 0 $aeng 135 $aur||||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aSVC 47th Annual Technical Conference proceedings 210 31$a[Place of publication not identified]$cSociety of Vacuum Coaters$d2004 215 $a1 online resource (755 p.) 300 $aBibliographic Level Mode of Issuance: Monograph 517 1 $aSociety of Vacuum Coaters 606 $aMechanical Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aIndustrial & Management Engineering$2HILCC 615 7$aMechanical Engineering 615 7$aEngineering & Applied Sciences 615 7$aIndustrial & Management Engineering 801 0$bPQKB 906 $aBOOK 912 $a9911006706903321 996 $aSVC 47th Annual Technical Conference proceedings$94389908 997 $aUNINA