LEADER 01623oam  2200469zu 450 
001 9911006684903321
005 20210807003513.0
010   $a0-8155-1772-6
010   $a1-59124-093-X
035   $a(CKB)111056552536396
035   $a(SSID)ssj0000403923
035   $a(PQKBManifestationID)12136555
035   $a(PQKBTitleCode)TC0000403923
035   $a(PQKBWorkID)10437285
035   $a(PQKB)11379863
035   $a(EXLCZ)99111056552536396
100   $a20160829d1993      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 00$aHandbook of semiconductor wafer cleaning technology : science, technology, and applications
210 31$a[Place of publication not identified]$cNoyes Publications$d1993
225 0 $aMaterials science and process technology series. Handbook of semiconductor wafer cleaning technology 
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a9780815513313 
311   $a0-8155-1331-3 
606   $aSemiconductor wafers$xCleaning
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductor wafers$xCleaning.
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.3815/2
702   $aKern$b Werner
801  0$bPQKB
906   $aBOOK
912   $a9911006684903321
996   $aHandbook of semiconductor wafer cleaning technology : science, technology, and applications$94389359
997   $aUNINA