LEADER 02445nam 2200577Ia 450 001 9911006676203321 005 20200520144314.0 010 $a1-282-02744-1 010 $a9786612027420 010 $a0-8155-1898-6 010 $a1-59124-252-5 035 $a(CKB)111056552534282 035 $a(OCoLC)309070649 035 $a(CaPaEBR)ebrary10265692 035 $a(SSID)ssj0000072955 035 $a(PQKBManifestationID)11997224 035 $a(PQKBTitleCode)TC0000072955 035 $a(PQKBWorkID)10103200 035 $a(PQKB)10424860 035 $a(MiAaPQ)EBC3008683 035 $a(BIP)46847702 035 $a(EXLCZ)99111056552534282 100 $a19871119d1988 uy 0 101 0 $aeng 135 $aurcn||||||||| 181 $ctxt 182 $cc 183 $acr 200 00$aSemiconductor materials and process technology handbook $efor very large scale integration (VLSI) and ultra large scale integration (ULSI) /$fedited by Gary E. McGuire 210 $aPark Ridge, N.J., U.S.A. $cNoyes Publications$dc1988 215 $a1 online resource (689 p.) 225 1 $aMaterials science and process technology series 300 $aBibliographic Level Mode of Issuance: Monograph 311 08$a0-08-094454-X 311 08$a0-8155-1150-7 320 $aIncludes bibliographical references and index. 330 $aThis handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology. 410 0$aMaterials science and process technology series. 606 $aIntegrated circuits$xVery large scale integration$xDesign and construction$vHandbooks, manuals, etc 606 $aSemiconductors 615 0$aIntegrated circuits$xVery large scale integration$xDesign and construction 615 0$aSemiconductors. 676 $a621.395 701 $aMcGuire$b G. E$027694 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911006676203321 996 $aSemiconductor materials and process technology handbook$9191725 997 $aUNINA